1. Stress Relaxation of a Patterned Microstructure on a Diaphragm;Journal of Materials Research;2002-07
2. Proximity X-ray and extreme ultraviolet lithography;Comptes Rendus de l'Académie des Sciences - Series IV - Physics;2000-09
3. Membrane-mask distortion correction: Analytical and experimental results;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
4. EB-X3: New electron-beam x-ray mask writer;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999
5. X-Ray Mask Fabrication Using New Membrane Process Techniques;Japanese Journal of Applied Physics;1997-12-30