Optical function of atomic layer deposited alumina (0.5–41.0 nm) from 191 to 1688 nm by spectroscopic ellipsometry with brief literature review
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, Brigham Young University, Provo, Utah 84602
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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3. A Tag-and-Count Approach for Quantifying Surface Silanol Densities on Fused Silica Based on Atomic Layer Deposition and High-Sensitivity Low-Energy Ion Scattering;SSRN Electronic Journal;2022
4. Diphenylsiloxane–dimethylsiloxane copolymer: Optical functions from 191 to 1688 nm (0.735–6.491 eV) by spectroscopic ellipsometry;Surface Science Spectra;2020-11-05
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