Optimization of HiPIMS discharges: The selection of pulse power, pulse length, gas pressure, and magnetic field strength-Reference-Cited by-同舟云学术

Optimization of HiPIMS discharges: The selection of pulse power, pulse length, gas pressure, and magnetic field strength

Published:2020-05 Issue:3 Volume:38 Page:033008
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Brenning Nils¹²³,Butler Alexandre¹,Hajihoseini Hamidreza⁴^ORCID,Rudolph Martin⁵^ORCID,Raadu Michael A.²,Gudmundsson Jon Tomas²⁴^ORCID,Minea Tiberiu¹,Lundin Daniel¹³^ORCID

Affiliation:

1. Laboratoire de Physique des Gaz et Plasmas—LPGP, UMR 8578 CNRS, Université Paris-Sud, Université Paris-Saclay, F-91405 Orsay Cedex, France

2. Department of Space and Plasma Physics, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-100 44 Stockholm, Sweden

3. Plasma and Coatings Physics Division, IFM-Materials Physics, Linköping University, SE-581 83 Linköping, Sweden

4. Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland

5. Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, 04318 Leipzig, Germany

Funder

Swedish Goverment Strategic Research Area in Materials Science

Free State of Saxony and the European Regional Development Fund

Swedish Research Council

Icelandic Icelandic Research Fund

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000079

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