Micro-electro-mechanical system fabrication technology applied to large area x-ray image sensor arrays-Reference-Cited by-同舟云学术

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Micro-electro-mechanical system fabrication technology applied to large area x-ray image sensor arrays

Published:2001-07 Issue:4 Volume:19 Page:1219-1223
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Daniel J. H.,Krusor B.,Apte R. B.,Mulato M.,Van Schuylenbergh K.,Lau R.,Do T.,Street R. A.,Goredema A.,Boils-Boissier D. C.,Kazmaier P. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1380226

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Theoretical investigation of partially pixelated scintillators for high-resolution imaging with less aliasing;Journal of Instrumentation;2019-12-10

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