Unintentional As incorporation into AlSb and interfacial layers within InAs/AlSb superlattices-Reference-Cited by-同舟云学术

Unintentional As incorporation into AlSb and interfacial layers within InAs/AlSb superlattices

Published:2019-05 Issue:3 Volume:37 Page:032902
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Hu Yunong¹²,Tam Man Chun²³^ORCID,Wasilewski Zbigniew R.¹²³⁴

Affiliation:

1. Department of Physics and Astronomy, University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada

2. Waterloo Institute for Nanotechnology (WIN), University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada

3. Department of Electrical and Computer Engineering, University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada

4. Institute for Quantum Computing (IQC), University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada

Funder

Natural Sciences and Engineering Research Council of Canada

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5088974

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