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2. The Physics of X-Ray Microlithography;The Physics of Submicron Lithography;1992
3. Optical Alignment for Lithography;Soft-X-Ray Projection Lithography;1991
4. An optical-heterodyne alignment technique for quarter-micron x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11
5. X-ray lithography: On the path to manufacturing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11