Excimer laser reactive ablation: An efficient approach for the deposition of high quality TiN films-Reference-Cited by-同舟云学术

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Excimer laser reactive ablation: An efficient approach for the deposition of high quality TiN films

Published:1993-09 Issue:5 Volume:11 Page:2577-2582
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Mihailescu I. N.,Chitica N.,Teodorescu V. S.,De Giorgi M. Luisa,Leggieri G.,Luches A.,Martino M.,Perrone A.,Dubreuil B.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578609

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3. Laser Gas–Assisted Nitriding of Ti Alloys;Comprehensive Materials Processing;2014

4. Laser nitriding: investigations on the model system TiN. A review;Heat and Mass Transfer;2010-12-15

5. Structural, electrical, and optical characterizations of laser deposited nanometric iron oxide films;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-03

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