Author:
Höche Daniel,Schaaf Peter
Publisher
Springer Science and Business Media LLC
Subject
Fluid Flow and Transfer Processes,Condensed Matter Physics
Reference125 articles.
1. Sproul WD (1996) Physical vapor deposition tool coatings. Surf Coat Technol 81:1–7
2. Crummenauer J (1995) TiN-Beschichtungen mittels Plasma-CVD. PhD thesis, Shaker Verlag, Aachen
3. Ritala M, Leskelä M, Rauhala E, Haussalo P (1995) Atomic layer epitaxy growth of TiN thin films. J Electrochem Soc 142:2731
4. Chowdhury R, Vispute RD, Jagannadham K, Narayan J (1996) Characteristic of titanium nitride films grown by pulsed laser deposition. J Mater Res 11:1458–1469
5. Baeuerle D (2000) Laser processing and chemistry, 3rd edn. Springer, New York
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