Electrical characteristics of (Pb,Sr)TiO[sub 3] thin films for ultra-large-scale-integrated dynamic random access memory capacitors prepared by liquid-source misted chemical deposition
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Published:2001
Issue:1
Volume:19
Page:275
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Chung H. J.,Woo S. I.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
40 articles.
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