Synchrotron‐radiation‐stimulated tungsten deposition on silicon from W(CO)6-Reference-Cited by-同舟云学术

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Synchrotron‐radiation‐stimulated tungsten deposition on silicon from W(CO)6

Published:1991-05 Issue:3 Volume:9 Page:931-934
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Zanoni R.,Piancastelli M. N.,Marsi M.,Margaritondo G.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577551

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deposition of Polyethylene Thin Films Using Synchrotron Radiation Ablation;Japanese Journal of Applied Physics;1999-02-15

2. Thermal and photoinduced chemistry of Mo(CO)6 on clean and chemically modified Ru(001);Surface Science;1996-10

3. Thermal and Photoinduced Desorption and Decomposition of Fe(CO)5 on Clean and Oxygen-Modified Ru(001);The Journal of Physical Chemistry;1996-01-01

4. Synchrotron radiation-induced Fe deposition on Si from organometallic precursors: Comparison with Fe silicides obtained by solid-phase epitaxy;Journal of Electron Spectroscopy and Related Phenomena;1995-12

5. Chemical vapour deposition of Cr, Mo and W thin films induced by synchrotron radiation;Vacuum;1995-08

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