Thermal and Photoinduced Desorption and Decomposition of Fe(CO)5 on Clean and Oxygen-Modified Ru(001)-Reference-Cited by-同舟云学术

Thermal and Photoinduced Desorption and Decomposition of Fe(CO)5 on Clean and Oxygen-Modified Ru(001)

Published:1996-01-01 Issue:46 Volume:100 Page:18138-18144
ISSN:0022-3654
Container-title:The Journal of Physical Chemistry
language:en
Short-container-title:J. Phys. Chem.

Author:

Huang H. H.¹,Sreekanth C. S.¹,Seet C. S.¹,Xu G. Q.¹,Chan L.²

Affiliation:

1. Department of Chemistry, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260

2. Chartered Semiconductor Manufacturing Pte. Ltd., 60 Woodlands Industrial Park D, Street 2, Singapore 738406

Publisher

American Chemical Society (ACS)

Subject

Physical and Theoretical Chemistry,General Engineering

Link

https://pubs.acs.org/doi/pdf/10.1021/jp961174z

Reference48 articles.

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5. A kinetic study of the chemical vapor deposition of iron films using iron pentacarbonyl

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