Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses-Reference-Cited by-同舟云学术

Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses

Published:2015-11 Issue:6 Volume:33 Page:06FJ01
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Ogawa Takashi¹,Cho Boklae¹,Ahn Sang Jung¹

Affiliation:

1. Center for Advanced Instrumentation, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, South Korea

Funder

National Research Council of Science and Technology of Republic of Korea

National Research Foundation of Korea (NRF)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4931933

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