Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer-Reference-Cited by-同舟云学术

Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer

Published:2018-05 Issue:3 Volume:36 Page:032902
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Ogawa Takashi¹,Takai Yoshizo²

Affiliation:

1. Korea Research Institute of Standards and Science, Advanced Instrumentation Institute, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, South Korea

2. Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

Funder

National Research Foundation of Korea

National Research Council of Science and Technology

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5025775

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1. High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun;Microscopy and Microanalysis;2022-12-01

2. A Novel Monochromator with Offset Cylindrical Lenses and Its Application to a Low-Voltage Scanning Electron Microscope;Microscopy and Microanalysis;2022-02-15

3. Aberration analysis of offset cylindrical lens using differential algebra method;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2021-01

4. Study and design of a lens-type retarding field energy analyzer without a grid electrode;Ultramicroscopy;2020-02

5. Evaluation of a monochromator with double cylindrical lenses for electron microscopy;International Journal of Modern Physics A;2019-12-30