Hydrogen depth profiling using SIMS—Problems and their solutions
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Published:1981-05
Issue:1
Volume:19
Page:47-52
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Magee C. W.,Botnick E.M.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
111 articles.
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