Continuous production of nanostructured particles using spatial atomic layer deposition-Reference-Cited by-同舟云学术

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Continuous production of nanostructured particles using spatial atomic layer deposition

Published:2015-03 Issue:2 Volume:33 Page:021513
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

van Ommen J. Ruud,Kooijman Dirkjan,Niet Mark de,Talebi Mojgan,Goulas Aristeidis

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4905725

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