Abstract
Highlights
Recent process of atomic layer deposition on catalytic and energy materials is summarized.
The enhanced catalytic and electrochemical performances are presented.
Atomic layer deposition reactors for mass production are highlighted.
The challenges on future applications of atomic layer deposition are discussed.
Funder
Tencent Foundation
Hubei Province Natural Science Foundation for Innovative Research Group
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities, HUST
Subject
Industrial and Manufacturing Engineering
Cited by
10 articles.
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