Inductively coupled plasma-induced etch damage of GaN p-n junctions-Reference-Cited by-同舟云学术

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Inductively coupled plasma-induced etch damage of GaN p-n junctions

Published:2000-07 Issue:4 Volume:18 Page:1139-1143
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Shul R. J.,Zhang L.,Baca A. G.,Willison C. G.,Han J.,Pearton S. J.,Ren F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582313

Cited by 90 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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