Temperature-resolved Fourier transform infrared study of condensation reactions and porogen decomposition in hybrid organosilicon-porogen films-Reference-Cited by-同舟云学术

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Temperature-resolved Fourier transform infrared study of condensation reactions and porogen decomposition in hybrid organosilicon-porogen films

Published:2004-01 Issue:1 Volume:22 Page:61-70
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Burkey Daniel D.,Gleason Karen K.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1627766

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