Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane-Reference-Cited by-同舟云学术

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Published:2021-01-25 Issue:3 Volume:33 Page:1022-1030
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Ashurbekova Kristina¹^ORCID,Ashurbekova Karina²,Saric Iva³,Gobbi Marco²⁴,Modin Evgeny²^ORCID,Chuvilin Andrey²⁴,Petravic Mladen³^ORCID,Abdulagatov Ilmutdin¹^ORCID,Knez Mato²⁴³^ORCID

Affiliation:

1. Dagestan State University, 367000 Makhachkala, Russia

2. CIC nanoGUNE BRTA, E-20018 Donostia-San Sebastián, Spain

3. Department of Physics and Centre for Micro- and Nanosciences and Technologies, University of Rijeka, 51000 Rijeka, Croatia

4. IKERBASQUE, Basque Foundation for Science, E-48009 Bilbao, Spain

Funder

Ministerio de Ciencia e Innovaci?n

European Regional Development Fund

Ministerio de Econom?a y Competitividad

Russian Federation Government

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.0c04408

Reference51 articles.

1. Analysis of Structures of Oligomeric Siloxanes from Dimethoxydimethylsilane under Heat Treatment by FT-IR

2. Highly Stable Ultrathin Carbosiloxane Films by Molecular Layer Deposition

3. Molecular Layer Deposition of a Highly Stable Silicon Oxycarbide Thin Film Using an Organic Chlorosilane and Water

4. Siloxane crosslinks with dynamic bond exchange enable shape programming in liquid-crystalline elastomers

5. Dimethylsilanone Generation from Pyrolysis of Polysiloxanes Filled with Nanosized Silica and Ceria/Silica

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