Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals-Reference-Cited by-同舟云学术

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Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals

Published:2020-05 Issue:3 Volume:38 Page:033003
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Mathioudaki Stella¹^ORCID,Vandenabeele Cédric R.¹^ORCID,Tonneau Romain¹^ORCID,Pflug Andreas²,Tennyson Jonathan³^ORCID,Lucas Stéphane¹

Affiliation:

1. Laboratory of Analysis by Nuclear Reaction, Namur Institute of Structured Matter, University of Namur, Rue de Bruxelles 61, 5000 Namur, Belgium

2. Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54e, 38108 Braunschweig, Germany

3. Department of Physics and Astronomy, University College London, Gower Street, London WC1E 6BT, United Kingdom

Funder

Walloon region

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5142913

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Foundations of plasma enhanced chemical vapor deposition of functional coatings;Plasma Sources Science and Technology;2023-07-01

2. Sonochemical Reaction of Bifunctional Molecules on Silicon (111) Hydride Surface;Molecules;2021-10-13

3. Microfluidic plasmas: Novel technique for chemistry and chemical engineering;Chemical Engineering Journal;2021-08

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