Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules
Author:
Affiliation:
1. Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 05006, Republic of Korea
Funder
Korea Evaluation Institute of Industrial Technology
Korea Institute of Energy Technology Evaluation and Planning
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5081490
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