Focused ion beam optical column design and consideration on minimum attainable beam size-Reference-Cited by-同舟云学术

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Focused ion beam optical column design and consideration on minimum attainable beam size

Published:1998-07 Issue:4 Volume:16 Page:2462
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Sakaguchi Kiyoshi

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A simple in situ method for optimizing settings for the Einzel lens elements in a focused ion beam;Review of Scientific Instruments;2023-03-01

2. Study and design of a lens-type retarding field energy analyzer without a grid electrode;Ultramicroscopy;2020-02

3. Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry;Applied Physics Express;2019-07-24

4. Development of Focused Ion Beam Column Using Ga Source;Transactions of the Korean Society of Mechanical Engineers A;2009-03-01

5. Optimization of focused ion beam performance;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009

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