Optimization of focused ion beam performance
Author:
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A simple in situ method for optimizing settings for the Einzel lens elements in a focused ion beam;Review of Scientific Instruments;2023-03-01
2. Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources;Beilstein Journal of Nanotechnology;2020-11-18
3. Optics of ion emission from the nano-aperture ion source;Advances in Imaging and Electron Physics Including Proceedings CPO-10;2019
4. Low-Energy Ions from Laser-Cooled Atoms;Physical Review Applied;2016-05-27
5. Cathodoluminescence Microscopy of nanostructures on glass substrates;Optics Express;2013-11-27
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