Large-area SiC membrane produced by plasma enhanced chemical vapor deposition at relatively high temperature
Author:
Affiliation:
1. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, People's Republic of China
Funder
the major National Scientific Instruments Devekoped Special Project
the National Natural Science Foundation of China
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4926896
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