Effect of substrate temperature and ion bombardment on the formation of cubic boron nitride films: A two-step deposition approach-Reference-Cited by-同舟云学术

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Effect of substrate temperature and ion bombardment on the formation of cubic boron nitride films: A two-step deposition approach

Published:2001-09 Issue:5 Volume:19 Page:2294-2300
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Ye J.,Oechsner H.,Westermeyr S.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1384561

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ab initio study of pressure-dependent phonon heat conduction in cubic boron nitride;International Journal of Heat and Mass Transfer;2023-07

2. Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method;Rare Metal Materials and Engineering;2015-05

3. Preparation and characterization of thick cubic boron nitride films;Chinese Physics B;2014-05-30

4. Effects of nitrogen gas ratio on magnetron sputtering deposited boron nitride films;Vacuum;2014-05

5. X-ray Absorption Studies on the Growth Process of Radio-Frequency-Magnetron-Sputtered Boron Nitride Films: Effects of Bias Voltage and Substrate Temperature;Japanese Journal of Applied Physics;2013-04-01

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