Principles in design and microfabrication of variable‐capacitance side‐drive motors-Reference-Cited by-同舟云学术

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Principles in design and microfabrication of variable‐capacitance side‐drive motors

Published:1990-07 Issue:4 Volume:8 Page:3614-3624
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Mehregany Mehran,Bart Stephen F.,Tavrow Lee S.,Lang Jeffrey H.,Senturia Stephen D.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.576515

Cited by 54 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Miniature Bulk PZT Traveling Wave Ultrasonic Motors for Low-Speed High-Torque Rotary Actuation;Journal of Microelectromechanical Systems;2018-06

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