Author:
Vender David,Oehrlein Gottlieb S.,Schwartz Geraldine C.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Interlevel Dielectrics;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
2. Infrared spectroscopic techniques for quantitative characterization of dielectric thin films on silicon wafers;Spectrochimica Acta Part A: Molecular Spectroscopy;1994-09