Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane-Reference-Cited by-同舟云学术

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Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane

Published:2003 Issue:2 Volume:21 Page:688
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Matsui S.,Igaku Y.,Ishigaki H.,Fujita J.,Ishida M.,Ochiai Y.,Namatsu H.,Komuro M.

Publisher

American Vacuum Society

Subject

General Engineering

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