Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2-Reference-Cited by-同舟云学术

Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2

Published:2018-05 Issue:3 Volume:36 Page:031602
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Alshehri Abdullah H.¹,Nelson-Fitzpatrick Nathan²,Ibrahim Khaled H.³,Mistry Kissan³,Yavuz Mustafa³,Musselman Kevin P.³

Affiliation:

1. Department of Mechanical and Mechatronics Engineering, University of Waterloo, 200 University Ave. West, Waterloo, Ontario N2L 3G1, Canada and Department of Mechanical Engineering, Prince Sattam bin Abdul Aziz University, Alkharj 11942, Saudi Arabia

2. Quantum NanoFab, University of Waterloo, 200 University Ave. West, Waterloo, Ontario N2L 3G1, Canada

3. Department of Mechanical and Mechatronics Engineering, University of Waterloo, 200 University Ave. West, Waterloo, Ontario N2L 3G1, Canada and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Ave. West, Waterloo, Ontario N2L 3G1, Canada

Funder

Prince Sattam bin Abdulaziz University

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5019170

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent Progress of Ion-Modified TiO2 for Enhanced Photocatalytic Hydrogen Production;Molecules;2024-05-16

2. Metal‐Insulator‐Insulator‐Metal Diodes with Responsivities Greater Than 30 A W −1 Based on Nitrogen‐Doped TiO x and AlO x Insulator Layers;Advanced Electronic Materials;2021-08-08

3. Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition;Advanced Functional Materials;2021-06-10

4. Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide;Journal of Vacuum Science & Technology A;2020-09

5. Plasmonic nanocomposites of zinc oxide and titanium nitride;Journal of Vacuum Science & Technology A;2020-07