Abstract: High‐rate magnetically enhanced sputter sources: Their basic physics and operational characteristics
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Published:1977-01
Issue:1
Volume:14
Page:122-122
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Lamont Lawrence T.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
7 articles.
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