In situ sputter deposition discharge diagnostics for tailoring ceramic film growth
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581278
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Near-edge optical absorption behavior of sputter deposited hafnium dioxide;Journal of Applied Physics;2007-06-15
2. Microwave dielectric behavior of nanocrystalline titanium dioxide thin films;Vacuum;2007-01
3. Near-ultraviolet optical absorption behavior of TiO2–Al2O3 multilayer films;Journal of Applied Physics;2006-06-15
4. Gas scattering effects and microstructural evaluation of electron beam evaporated titanium coatings in neon and argon at different gas pressures;Vacuum;2003-11
5. Investigation of interactions between inert gases and nitrogen in direct current triode discharges;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2003-09
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