Investigation of interactions between inert gases and nitrogen in direct current triode discharges-Reference-Cited by-同舟云学术

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Investigation of interactions between inert gases and nitrogen in direct current triode discharges

Published:2003-09 Issue:5 Volume:21 Page:1683-1687
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Davison A.,Avelar-Batista J. C.,Wilson A. D.,Leyland A.,Matthews A.,Fancey K. S.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1597892

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas;AIP Advances;2011-09

2. Measurement of the Degree of Dissociation in Inductively Coupled Nitrogen Discharges by Using Optical Emission Actinometry and Mass Spectrometry;Journal of the Korean Physical Society;2008-08-14

3. Characterization of neutral species densities in dual frequency capacitively coupled photoresist ash plasmas by optical emission actinometry;Journal of Applied Physics;2006-10-15

4. Plasma nitriding of Ti6Al4V alloy and AISI M2 steel substrates using D.C. glow discharges under a triode configuration;Surface and Coatings Technology;2005-11

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