Microelectromechanical systems for biomimetical applications-Reference-Cited by-同舟云学术

Microelectromechanical systems for biomimetical applications

Published:2010-11 Issue:6 Volume:28 Page:C6N1-C6N6
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Latif Rhonira,Mastropaolo Enrico,Bunting Andy,Cheung Rebecca,Koickal Thomas,Hamilton Alister,Newton Michael,Smith Leslie

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3504892

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reactive ion etching of tantalum in silicon tetrachloride;Microelectronic Engineering;2022-04

2. Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer;International Journal of Refractory Metals and Hard Materials;2020-11

3. 3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications;Microsystem Technologies;2020-08-27

4. Control of physical and microstructural properties in molybdenum by direct current magnetron sputtering deposition producing bilayer thin film;Thin Solid Films;2018-11

5. Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy;Journal of Nanotechnology;2017