Impact of ion species on ion beam sputtered Ta2O5 layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings-Reference-Cited by-同舟云学术

Impact of ion species on ion beam sputtered Ta2O5 layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings

Published:2021-12 Issue:6 Volume:39 Page:063402
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Sakiew Wjatscheslaw¹^ORCID,Schwerdtner Philippe¹,Jupé Marco²³,Pflug Andreas⁴,Ristau Detlev²³^ORCID

Affiliation:

1. Cutting Edge Coatings GmbH, Garbsener Landstrasse 10, 30419 Hannover, Germany

2. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany

3. Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering—Innovation Across Disciplines), Leibniz University Hannover, 30167 Hannover, Germany

4. Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54 e, 38108 Braunschweig, Germany

Funder

Deutsche Forschungsgemeinschaft

Bundesministerium für Bildung und Forschung

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001224

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3. Features of obtaining tantalum-containing coatings by magnetron sputtering;Letters on Materials;2022-03