Reactive radio frequency sputter deposition of higher nitrides of titanium, zirconium, and hafnium-Reference-Cited by-同舟云学术

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Reactive radio frequency sputter deposition of higher nitrides of titanium, zirconium, and hafnium

Published:1986-05 Issue:3 Volume:4 Page:381-387
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Yee D. S.,Cuomo J. J.,Frisch M. A.,Smith D. P. E.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.573933

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