Production of milliampere class mass‐separated multiply charged ion beam
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.577506
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of a continuously variable energy radio frequency quadrupole accelerator for SiC power semiconductor device fabrication;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
2. High energy aluminum ion implantation using a variable energy radio frequency quadrupole implanter;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-03
3. Measurement of input beam emittance to obtain MeV, mA-class heavy ion beams in a VERFQ linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1995-09
4. Variable energy r.f. quadrupole for high-energy ion implantation;Surface and Coatings Technology;1994-08
5. Acceleration of high current heavy ions using a variable energy radio‐frequency quadrupole linac and measurement of the input beam emittance;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-03
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