Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics-Reference-Cited by-同舟云学术

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Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics

Published:2002 Issue:6 Volume:20 Page:2393
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Graham Samuel,Steinhaus Charles,Clift Miles,Klebanoff Leonard

Publisher

American Vacuum Society

Subject

General Engineering

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