Importance of chain reactions in the plasma deposition of hydrogenated amorphous silicon
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.572025
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4. Bond-order correlation energies for small Si-containing molecules compared withab initioresults from low-order Møller–Plesset perturbation theory;Molecular Physics;2006-05-10
5. Molecular dynamics study of the interactions of small thermal and energetic silicon clusters with crystalline and amorphous silicon surfaces;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
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