Alloy Sputtering Studies with in situ Auger Electron Spectroscopy
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Published:1971-01
Issue:1
Volume:8
Page:23-23
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Tarng M. L.,Wehner G. K.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
12 articles.
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