Influence of the elemental composition and crystal structure on the vacuum properties of Ti–Zr–V nonevaporable getter films-Reference-Cited by-同舟云学术

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Influence of the elemental composition and crystal structure on the vacuum properties of Ti–Zr–V nonevaporable getter films

Published:2001 Issue:6 Volume:19 Page:2925
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Benvenuti C.,Chiggiato P.,Mongelluzzo A.,Prodromides A.,Ruzinov V.,Scheuerlein C.,Taborelli M.,Lévy F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 57 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. SRPES and XPS Analysis of Activation and Deterioration Processes for Ti-Zr-V NEG Coating;e-Journal of Surface Science and Nanotechnology;2024-08-31

3. Effect of Adding Al on the Phase Structure and Gettering Performance of TiZrV Non-Evaporable Getter Materials;Materials;2024-04-24

4. Research on the deposition and properties characterization of novel conductive getter films on the inner wall of accelerator vacuum chamber;Journal of Instrumentation;2023-11-01

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