Research on performance of porous scaffold-based getter activated by induction heating and its application in MEMS device-Reference-Cited by-同舟云学术

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Research on performance of porous scaffold-based getter activated by induction heating and its application in MEMS device

Published:2024-12 Issue: Volume:230 Page:113626
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Zheng Kang^ORCID,Wang Tianpeng^ORCID,Wu Muhan,Gu Dandan,Lv Wenlong,Wang Lingyun^ORCID

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Reference33 articles.

1. High vacuum wafer level packaging for uncooled infrared sensor;Urquia,2020

2. An all-silicon process platform for wafer-level vacuum packaged MEMS devices;Torunbalci;IEEE Sensor. J.,2021

3. Review of vacuum packaging and maintenance of MEMS and the use of getters therein;Kullberg;J. Nanolithogr. MEMS, MOEMS,2009

4. Development and characterization of non-evaporable getter thin films with Ru seeding layer for MEMS applications;Bourim;Micromachines,2018

5. Vacuum material[M];Zhang,2005

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