Sputter deposition of Al-doped ZnO films with various incident angles-Reference-Cited by-同舟云学术

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Sputter deposition of Al-doped ZnO films with various incident angles

Published:2009-09 Issue:5 Volume:27 Page:1166-1171
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sato Yasushi,Yanagisawa Kei,Oka Nobuto,Nakamura Shin-ichi,Shigesato Yuzo

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3186618

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