Vapor phase reactions in polymerization plasma for divinylsiloxane-bis-benzocyclobutene film deposition-Reference-Cited by-同舟云学术

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Vapor phase reactions in polymerization plasma for divinylsiloxane-bis-benzocyclobutene film deposition

Published:2006-11 Issue:6 Volume:24 Page:2192-2198
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kinoshita Keizo,Nakano Akinori,Kawahara Jun,Kunimi Nobutaka,Hayashi Yoshihiro,Kiso Osamu,Saito Naoaki,Nakamura Keiji,Kikkawa Takamaro

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2359738

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Etching-Selectivity Barrier SiC (k<3.5) Film for 32-nm-Node Copper/Low-kInterconnects;Japanese Journal of Applied Physics;2010-05-20

2. Characterization of oxygen and nitrogen rapid thermal annealing processes for ultra-low-k SiCOH films;Journal of Materials Research;2008-03

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