Full MEMS monolithic microcolumn for wafer-level arrayal

Author:

Kim Hak,Han Changho,Kim Jinkwang,Kim Hoseob,Chun Kukjin

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication and characterization of a miniaturized octupole deflection system for the MEMS electron microscope;Ultramicroscopy;2021-06

2. Variations of the field of view depending on the Si deflector shape in a microcolumn;Journal of Vacuum Science & Technology B;2018-11

3. Electron optics column for a new MEMS-type transmission electron microscope;B POL ACAD SCI-TECH;2018

4. Development of arrayed microcolumns and field emitters;Japanese Journal of Applied Physics;2017-05-17

5. Proposed architecture of a multicolumn electron-beam wafer inspection system for high-volume manufacturing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11

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