Variations of the field of view depending on the Si deflector shape in a microcolumn-Reference-Cited by-同舟云学术

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Variations of the field of view depending on the Si deflector shape in a microcolumn

Published:2018-11 Issue:6 Volume:36 Page:06J902
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Kim Hyung Woo¹,Lee Young Bok¹,Kim Dae-Wook¹,Ahn Seungjoon¹,Oh Tae Sik¹,Kim Ho Seob¹,Kim Young Chul²

Affiliation:

1. Department of Physics and Nanoscience, Sun Moon University, 70, Sunmoon-ro 221, Tangjeong-myeon, Asan-si, Chungcheongnam-do 31460, South Korea

2. Department of Optometry, Eulji University, 553, Sanseong-daero, Sujeong-gu, Seongnam-si, Gyeonggi-do 13135, South Korea

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5048128

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Study on the Large-Area Image Acquisition Using Stage Transfer Synchronization Method in a Low-Energy Microcolumn System;Journal of Nanoelectronics and Optoelectronics;2021-07-01

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