1. Department of Micro- and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany
2. Mikrosistemi Ltd., Bul. Levski Computer Centre, 9010 Varna, Bulgaria
3. nano analytik GmbH, Ehrenbergstraße 11, 98693 Ilmenau, Germany