Nanoscale structure fabrication of multiple AlGaSb∕InGaSb quantum wells by reactive ion etching with chlorine-based gases toward photonic crystals-Reference-Cited by-同舟云学术

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Nanoscale structure fabrication of multiple AlGaSb∕InGaSb quantum wells by reactive ion etching with chlorine-based gases toward photonic crystals

Published:2006 Issue:5 Volume:24 Page:2291
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Gozu Shin-ichiro,Akahane Kouichi,Yamamoto Naokatsu,Ueta Akio,Ohtani Naoki,Tsuchiya Masahiro

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Merging Nanowires and Formation Dynamics of Bottom‐Up Grown InSb Nanoflakes;Advanced Functional Materials;2023-02-08

2. Efficient luminescence extraction strategies and anti-reflective coatings to enhance optical refrigeration of semiconductors;Journal of Luminescence;2016-02

3. Widely Tunable Photonic Crystal Coupled Cavity Lasers on GaSb;IEEE Photonics Technology Letters;2008-07

4. GaSb-based lasers with two-dimensional photonic crystal mirrors;Nanotechnology;2007-11-29

5. Strong optical emissions from two-dimensional metal photonic crystals with semiconductor multiple quantum wells;Journal of Applied Physics;2007-04-15

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