Populations of metastable and resonant argon atoms in radio frequency magnetron plasmas used for deposition of indium-zinc-oxide films
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.3674162
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2. Plasma–graphene interactions: combined effects of positive ions, vacuum-ultraviolet photons, and metastable species;Journal of Physics D: Applied Physics;2021-05-26
3. Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target;Plasma Sources Science and Technology;2021-03-01
4. Ultra-high-resolution optical absorption spectroscopy of DC plasmas at low pressure using a supercontinuum laser combined with a laser line tunable filter and a HyperFine spectrometer;Journal of Physics D: Applied Physics;2020-12-09
5. Preferential self-healing at grain boundaries in plasma-treated graphene;Nature Materials;2020-07-20
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