Characterization and analysis of silicon on insulator fabricated by separation by implanted oxygen layer transfer-Reference-Cited by-同舟云学术

Characterization and analysis of silicon on insulator fabricated by separation by implanted oxygen layer transfer

Published:2010-01 Issue:1 Volume:28 Page:163-168
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Wei Xing,Wu Aimin,Wang Xiang,Li Xianyuan,Ye Fei,Chen Jie,Chen Meng,Zhang Bo,Li Chenglu,Zhang Miao,Wang Xi

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3290750

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