Gas-phase studies in inductively coupled fluorocarbon plasmas-Reference-Cited by-同舟云学术

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Gas-phase studies in inductively coupled fluorocarbon plasmas

Published:2001 Issue:6 Volume:19 Page:2946
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Schaepkens M.,Martini I.,Sanjuan E. A.,Li X.,Oehrlein G. S.,Perry W. L.,Anderson H. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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